An Insight into Deposition Sources

Deposition sources are also known as evaporation sources. When talking about deposition or evaporation sources, let’s start with different properties:

Physical Properties

Pieces, tablets, pellets, canes, slugs, clips, foil, target, wire, and rod to customer specification

Chemical Properties

·         Concrete metal elements to customer specification

·         Alloy to customer specification

·         Intermetallic to customer specification

·         Ceramic such as carbide, oxide, boride, fluoride, sulfide, telluride, monoxide, titanate, and more

·         Compounds to customer specification

Typical Applications

A significant example of an evaporation process is the production of aluminized PET film packaging. The layer of aluminum in this material is not thick enough to be opaque since a thinner layer can be deposited in a cheap manner. The main reason is to separate the elemnt from the external environment by creating a barrier to the passage of light, oxygen, or water vapor.

Description

Evaporation is a common type of thin-film deposition. The main source is evaporated in a vacuum. It allows vapor particles to travel directly to the target object, where they condense back to a solid-state. Evaporation can be used in microfabrication, and in order to make macro-scale products like metallized plastic film.

Evaporation consists of two basic processes – a hot source material can evaporate and condenses on the substrate. It resembles the related process by which liquid water appears on the lid of a boiling pot. However, the gas environment, as well as a heat source, is different.

Evaporation can take place in a vacuum that is vapors other than the source material can be removed before the process starts. When it comes to high vacuum, evaporated particles can travel to the deposition target in the absence of colliding with the background gas. At a typical pressure of 10-4 Pa, a 0.4-nm particle comes with a free path of 60 m. In the evaporation chamber, hot objects like heating filaments, producing unwanted vapors can limit the vacuum's quality.

Evaporated atoms that hit with foreign particles may react with them. For example, if aluminum is deposited with oxygen, it will form aluminum oxide. They also eliminate the amount of vapor that reaches the substrate that makes the thickness difficult to control.

When Deposition Sources is performed in a poor vacuum or close to atmospheric pressure, it results not to be a smooth film. Instead, the deposition will appear fuzzy.

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Created on Feb 4th 2021 04:08. Viewed 273 times.

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